Invention Grant
- Patent Title: Fin field effect transistor having a highly doped region
- Patent Title (中): Fin场效应晶体管具有高掺杂区域
-
Application No.: US13930242Application Date: 2013-06-28
-
Publication No.: US09000536B2Publication Date: 2015-04-07
- Inventor: Chih-Wei Kuo , Hou-Yu Chen , Shyh-Horng Yang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119 ; H01L29/78 ; H01L29/66

Abstract:
The present disclosure relates a Fin field effect transistor (FinFET) device having large effective oxide thickness that mitigates hot carrier injection, and an associated method of formation. In some embodiments, the FinFET device has a conductive channel of a first fin protruding from a planar substrate. The conductive channel has a non-conductive highly doped region located along multiple outer edges of the channel region. A gate region protrudes from the planar substrate as a second fin that overlies the first fin. A gate dielectric region is located between the non-conductive highly doped region and the gate region. The non-conductive highly doped region and the gate dielectric region collectively provide for an effective oxide thickness of the FinFET device that allow a low electric field across gate oxide and less hot carrier injection.
Public/Granted literature
- US20150001593A1 Method for Forming Multi-Gate Device with Dual Channel Public/Granted day:2015-01-01
Information query
IPC分类: