Invention Grant
- Patent Title: Semiconductor device and a method for manufacturing a semiconductor device
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US13738217Application Date: 2013-01-10
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Publication No.: US09000540B2Publication Date: 2015-04-07
- Inventor: Hiroshi Sunamura , Naoya Inoue , Kishou Kaneko
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Young & Thompson
- Priority: JP2012-021069 20120202
- Main IPC: H01L29/18
- IPC: H01L29/18 ; H01L29/10 ; H01L21/02 ; H01L29/78 ; H01L29/40 ; H01L29/786 ; H01L27/12 ; H01L27/06 ; H01L23/498 ; H01L27/108 ; H01L27/11 ; H01L27/115 ; H01L21/8238

Abstract:
The performances of semiconductor elements disposed in a multilayer wiring layer are improved. A semiconductor device includes: a first wire disposed in a first wiring layer; a second wire disposed in a second wiring layer stacked over the first wiring layer; a gate electrode arranged between the first wire and the second wire in the direction of stacking of the first wiring layer and the second wiring layer, and not coupled with the first wire and the second wire; a gate insulation film disposed over the side surface of the gate electrode; and a semiconductor layer disposed over the side surface of the gate electrode via the gate insulation film, and coupled with the first wire and the second wire.
Public/Granted literature
- US20130200472A1 SEMICONDUCTOR DEVICE AND A METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE Public/Granted day:2013-08-08
Information query
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