Invention Grant
US09000793B2 Fine pitch probes for semiconductor testing, and a method to fabricate and assemble same
有权
用于半导体测试的细间距探针,以及制造和组装相同的方法
- Patent Title: Fine pitch probes for semiconductor testing, and a method to fabricate and assemble same
- Patent Title (中): 用于半导体测试的细间距探针,以及制造和组装相同的方法
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Application No.: US13744194Application Date: 2013-01-17
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Publication No.: US09000793B2Publication Date: 2015-04-07
- Inventor: Florent Cros , Lakshmi Namburi , Ting Hu
- Applicant: Advantest America, Inc.
- Applicant Address: US CA San Jose
- Assignee: Advantest America, Inc.
- Current Assignee: Advantest America, Inc.
- Current Assignee Address: US CA San Jose
- Agent Manuel de la Cerra
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G01R1/067 ; G01R1/073

Abstract:
An apparatus for testing electronic devices is disclosed. The apparatus includes a plurality of probes attached to a substrate; each probe capable of elastic deformation when the probe tip comes in contact with the electronic; each probe comprising a plurality of isolated electrical vertical interconnected accesses (vias) connecting each probe tip to the substrate, such that each probe tip of the plurality is capable of conducting an electrical current from the device under test to the substrate. The plurality of probes may form a probe comb. Also disclosed is a probe comb holder that has at least one slot where the probe comb may be disposed. A method for assembling and disassembling the probe comb and probe comb holder is also disclosed which allows for geometric alignment of individual probes.
Public/Granted literature
- US20140132300A1 FINE PITCH PROBES FOR SEMICONDUCTOR TESTING, AND A METHOD TO FABRICATE AND ASSEMBLE SAME Public/Granted day:2014-05-15
Information query
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