Invention Grant
- Patent Title: Lithographic systems and processes of making and using same
- Patent Title (中): 平版印刷系统及其制作和使用过程
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Application No.: US13626416Application Date: 2012-09-25
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Publication No.: US09001310B2Publication Date: 2015-04-07
- Inventor: Dirk Juergens
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/54 ; G03F7/26 ; G03F7/20
Abstract:
A lithographic system includes a projection system for projecting an object field through a projection system's pupil onto an image field. The projection system includes an optical element located at the projection system's pupil. The projection system's pupil is manipulable with respect to normalized pupil heights by the optical element. Related processes are also disclosed.
Public/Granted literature
- US20130094010A1 LITHOGRAPHIC SYSTEMS AND PROCESSES OF MAKING AND USING SAME Public/Granted day:2013-04-18
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