Invention Grant
- Patent Title: Electromechanical device with optical function separated from mechanical and electrical function
- Patent Title (中): 具有光学功能的机电装置与机电功能分离
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Application No.: US13648750Application Date: 2012-10-10
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Publication No.: US09001412B2Publication Date: 2015-04-07
- Inventor: Clarence Chui , William Cummings , Brian James Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
- Applicant: QUALCOMM MEMS Technologies, Inc.
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Bear, LLP
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02F1/29 ; G02B26/02 ; B81B3/00 ; G02B26/08 ; G09G3/36 ; G02F1/1335 ; G02F1/01 ; G09G3/34
Abstract:
A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
Public/Granted literature
- US20130069958A1 ELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION Public/Granted day:2013-03-21
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