Invention Grant
- Patent Title: Method for fabricating side shields in a magnetic writer
- Patent Title (中): 在磁性写入器中制造侧面屏蔽的方法
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Application No.: US14300035Application Date: 2014-06-09
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Publication No.: US09001467B1Publication Date: 2015-04-07
- Inventor: Xianzhong Zeng , Mingjun Yu , Hai Sun , Donghong Li
- Applicant: Western Digital (Fremont), LLC
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: G11B5/31
- IPC: G11B5/31 ; G03F7/20 ; G11B5/11

Abstract:
A method and system provide a magnetic transducer having an air-bearing surface (ABS) location, a pole and a gap. The pole has a bottom and a top wider than the bottom. The gap is on the top of the pole and at least as wide as the top of the pole such that an overhang is formed between a top edge of the gap and a bottom edge of the bottom of the pole. The method includes providing a plurality of bottom antireflective coatings (BARCs). The plurality of BARCs form a BARC layer that fills the overhang. A shield photoresist mask is provided on at least a portion of the BARC layer. The shield, which includes at least one side shield, is provided.
Information query
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