Invention Grant
- Patent Title: Methods and apparatuses for utilizing adaptive predictive algorithms and determining when to use the adaptive predictive algorithms for virtual metrology
- Patent Title (中): 用于利用自适应预测算法并确定何时使用自适应预测算法进行虚拟计量的方法和装置
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Application No.: US13027072Application Date: 2011-02-14
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Publication No.: US09002492B2Publication Date: 2015-04-07
- Inventor: James Moyne
- Applicant: James Moyne
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman, LLP
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G05B23/02
Abstract:
Described herein are methods, apparatuses, and systems for determining adaptive predictive algorithms for virtual metrology. In some embodiments, a computer implemented method identifies a plurality of predictive algorithms. The method determines when to use one or more of the plurality of predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility.
Public/Granted literature
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