Invention Grant
- Patent Title: Simultaneous testing of semiconductor components on a wafer
- Patent Title (中): 同时测试晶圆上的半导体元件
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Application No.: US13025657Application Date: 2011-02-11
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Publication No.: US09002673B2Publication Date: 2015-04-07
- Inventor: Arya Reza Behzad , Ahmadreza Rofougaran , Sam Ziqun Zhao , Jesus Alfonso Castaneda , Michael Boers
- Applicant: Arya Reza Behzad , Ahmadreza Rofougaran , Sam Ziqun Zhao , Jesus Alfonso Castaneda , Michael Boers
- Applicant Address: US CA Irvine
- Assignee: Broadcom Corporation
- Current Assignee: Broadcom Corporation
- Current Assignee Address: US CA Irvine
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G01R31/14
- IPC: G01R31/14 ; G01R31/28 ; G01R31/302 ; G01R31/311

Abstract:
Methods and apparatus are disclosed to simultaneously, wirelessly test semiconductor components formed on a semiconductor wafer. The semiconductor components transmit respective outcomes of a self-contained testing operation to wireless automatic test equipment via a common communication channel. Multiple receiving antennas observe the outcomes from multiple directions in three dimensional space. The wireless automatic test equipment determines whether one or more of the semiconductor components operate as expected and, optionally, may use properties of the three dimensional space to determine a location of one or more of the semiconductor components. The wireless testing equipment may additionally determine performance of the semiconductor components by detecting infrared energy emitted, transmitted, and/or reflected by the semiconductor wafer before, during, and/or after a self-contained testing operation.
Public/Granted literature
- US20110313710A1 Simultaneous Testing of Semiconductor Components on a Wafer Public/Granted day:2011-12-22
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