Invention Grant
- Patent Title: Bonding apparatus and bonding method
- Patent Title (中): 接合装置和接合方法
-
Application No.: US14249852Application Date: 2014-04-10
-
Publication No.: US09010615B2Publication Date: 2015-04-21
- Inventor: Kazuhiro Yoshimoto , Yuzo Shimobeppu , Kazuo Teshirogi , Yoshiaki Shinjo
- Applicant: Fujitsu Semiconductor Limited
- Applicant Address: JP Yokohama
- Assignee: Fujitsu Semiconductor Limited
- Current Assignee: Fujitsu Semiconductor Limited
- Current Assignee Address: JP Yokohama
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2006-075375 20060317
- Main IPC: B23K31/12
- IPC: B23K31/12 ; H05K13/08 ; H01L21/67 ; H01L23/00 ; H05K13/04 ; B23K31/00

Abstract:
To provide a bonding apparatus capable of increasing product quality by realizing high-precision control of a pressing force applied upon mounting of an electronic component on a substrate by bonding, and to a bonding method capable of providing high-quality products stably. The bonding apparatus includes: at least a bonding head 100 for pressing an electronic component 6 against a substrate 1 to bond it to the substrate 1; a plurality of load detection mechanisms (e.g., load sensors 5) substantially equally spaced so as to face one another under a substrate stage S supporting the substrate 1 provided with the electronic component 6; and a pressure detection unit 20 for detecting pressing force at the bonding surface between the electronic component 6 and substrate 1 on the basis of the pressure values detected by the individual load detection mechanisms 5.
Public/Granted literature
- US20140217153A1 BONDING APPARATUS AND BONDING METHOD Public/Granted day:2014-08-07
Information query
IPC分类: