Invention Grant
- Patent Title: Polishing pad and manufacturing method therefor
- Patent Title (中): 抛光垫及其制造方法
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Application No.: US14111962Application Date: 2012-04-16
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Publication No.: US09011212B2Publication Date: 2015-04-21
- Inventor: Kouki Itoyama , Fumio Miyazawa
- Applicant: Kouki Itoyama , Fumio Miyazawa
- Applicant Address: JP Tokyo
- Assignee: Fujibo Holdings, Inc.
- Current Assignee: Fujibo Holdings, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Buchanan, Ingersoll & Rooney PC
- Priority: JP2011-091283 20110415
- International Application: PCT/JP2012/060273 WO 20120416
- International Announcement: WO2012/141327 WO 20121018
- Main IPC: H01L21/304
- IPC: H01L21/304 ; C08J9/12 ; C08G18/48 ; C08G18/10 ; B24B37/22 ; B24B37/24 ; C08G101/00

Abstract:
Provided are a polishing pad which remedies the problem of scratches occurring when a conventional hard (dry) polishing pad is used, which is excellent in polishing rate and polishing uniformity, and which can be used for not only primary polishing but also finish polishing, and a manufacturing method therefor. The polishing pad is a polishing pad for polishing a semiconductor device, comprising a polishing layer having a polyurethane-polyurea resin foam containing substantially spherical cells, wherein the polyurethane-polyurea resin foam has a Young's modulus E in a range from 450 to 30000 kPa, and a density D in a range from 0.30 to 0.60 g/cm3.
Public/Granted literature
- US20140106652A1 POLISHING PAD AND MANUFACTURING METHOD THEREFOR Public/Granted day:2014-04-17
Information query
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