Invention Grant
US09011636B2 Automatic matching method, computer-readable storage medium, automatic matching unit, and plasma processing apparatus
有权
自动匹配方法,计算机可读存储介质,自动匹配单元和等离子体处理装置
- Patent Title: Automatic matching method, computer-readable storage medium, automatic matching unit, and plasma processing apparatus
- Patent Title (中): 自动匹配方法,计算机可读存储介质,自动匹配单元和等离子体处理装置
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Application No.: US13040719Application Date: 2011-03-04
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Publication No.: US09011636B2Publication Date: 2015-04-21
- Inventor: Mitsutoshi Ashida
- Applicant: Mitsutoshi Ashida
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2010-048291 20100304
- Main IPC: C23C16/50
- IPC: C23C16/50 ; C23C16/52 ; H03H7/38 ; H03H7/40 ; H01J37/32 ; C23F1/08

Abstract:
A controller 90 of an automatic matching unit includes a first and a second matching control unit 100, 102 for respectively variably controlling the electrostatic capacitances of a first and a second variable capacitors 80, 82 through a first and a second stepping motor 86, 88 such that a measured absolute value ZMm and a measured phase Zθm of a load impedance obtained by an impedance measuring unit 84 become close to a predetermined reference absolute value ZMs and a predetermined reference phase Zθs, respectively; and a gain control unit 112. The gain control unit 112 variably controls a proportional gain of at least one of the first and the second matching unit based on current electrostatic capacitances NC1 and NC2 of the first and the second variable capacitors 80, 82 obtained by a first and a second electrostatic capacitance monitoring unit 108, 110, respectively.
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