Invention Grant
US09011655B2 Device for generating cold plasma in a vacuum chamber and use of said device for thermo-chemical processing
有权
用于在真空室中产生冷等离子体的装置以及所述用于热化学处理的装置
- Patent Title: Device for generating cold plasma in a vacuum chamber and use of said device for thermo-chemical processing
- Patent Title (中): 用于在真空室中产生冷等离子体的装置以及所述用于热化学处理的装置
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Application No.: US12526904Application Date: 2008-02-01
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Publication No.: US09011655B2Publication Date: 2015-04-21
- Inventor: Philippe Maurin-Perrier , Hervé Chavanne , Laure Poigt
- Applicant: Philippe Maurin-Perrier , Hervé Chavanne , Laure Poigt
- Applicant Address: FR Andrezieux Boutheon
- Assignee: H.E.F.
- Current Assignee: H.E.F.
- Current Assignee Address: FR Andrezieux Boutheon
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Priority: FR0753289 20070215
- International Application: PCT/FR2008/050166 WO 20080201
- International Announcement: WO2008/104669 WO 20080904
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C25B11/00 ; C25B13/00 ; H05H1/24 ; H01J37/32
Abstract:
A device for generating a cold plasma in a vacuum enclosure includes a cathode body having hollow chambers for confining the plasma. Magnets are placed around each hollow chamber for creating a magnetic field forcing electrons to rotate about the field lines. The cathode body cooperates with an element for circulating a coolant to extract the heat generated by an intense ion bombardment at each of the hollow chambers.
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