Invention Grant
US09012123B2 Positive resist composition and pattern forming method using the same
有权
正型抗蚀剂组合物和使用其的图案形成方法
- Patent Title: Positive resist composition and pattern forming method using the same
- Patent Title (中): 正型抗蚀剂组合物和使用其的图案形成方法
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Application No.: US12922041Application Date: 2009-03-26
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Publication No.: US09012123B2Publication Date: 2015-04-21
- Inventor: Kei Yamamoto , Akinori Shibuya
- Applicant: Kei Yamamoto , Akinori Shibuya
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2008-088776 20080328; JP2009-049662 20090303; JP2009-071006 20090323
- International Application: PCT/JP2009/056837 WO 20090326
- International Announcement: WO2009/119894 WO 20091001
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039 ; G03F7/26 ; G03F7/00 ; G03F7/075 ; G03F7/20

Abstract:
A positive resist composition and a pattern forming method using the resist composition are provided, the resist composition including: (A) a resin containing a repeating structural unit represented by formula (I) as defined in the specification and being capable of decomposing by an action of an acid to increase the solubility in an alkali developer; (B) an acid generator; and (C) a mixed solvent containing at least one solvent selected from the group consisting of the following Group (a) and at least one solvent selected from the group consisting of the following Groups (b) to (d): Group (a): an alkylene glycol monoalkyl ether, Group (b): an alkylene glycol monoalkyl ether carboxylate, Group (c): a linear ketone, a branched chain ketone, a cyclic ketone, a lactone and an alkylene carbonate, and Group (d): a lactic acid ester, an acetic acid ester and an alkoxypropionic acid ester.
Public/Granted literature
- US20110014571A1 POSITIVE RESIST COMPOSITION AND PATTERN FORMING METHOD USING THE SAME Public/Granted day:2011-01-20
Information query
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