Invention Grant
US09012270B2 Metal layer enabling directed self-assembly semiconductor layout designs
有权
金属层可实现定向自组装半导体布局设计
- Patent Title: Metal layer enabling directed self-assembly semiconductor layout designs
- Patent Title (中): 金属层可实现定向自组装半导体布局设计
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Application No.: US13832442Application Date: 2013-03-15
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Publication No.: US09012270B2Publication Date: 2015-04-21
- Inventor: Ji Xu , Vito Dai
- Applicant: Ji Xu , Vito Dai
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L21/768 ; H01L23/535

Abstract:
Methods for forming a DSA pre-patterned semiconductor transistor layout and the resulting devices are disclosed. Embodiments may include forming a pre-patterned transistor layout by directed self-assembly (DSA), forming a metal layer over the DSA pre-patterned transistor layout, including: forming a plurality of horizontal metal lines; and forming a plurality of vertical metal segments discontinuous from and between adjacent horizontal metal lines; and forming one or more bridging dots each connecting one of the plurality of horizontal metal lines to one of the plurality of vertical metal segments, wherein locations of the bridging dots determine logic functions of resulting transistor cells.
Public/Granted literature
- US20140264461A1 METAL LAYER ENABLING DIRECTED SELF-ASSEMBLY SEMICONDUCTOR LAYOUT DESIGNS Public/Granted day:2014-09-18
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