Invention Grant
- Patent Title: Test piece and manufacturing method thereof
- Patent Title (中): 试件及其制造方法
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Application No.: US13828695Application Date: 2013-03-14
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Publication No.: US09012332B2Publication Date: 2015-04-21
- Inventor: Yu-Lin Lin
- Applicant: Hui-Ping Chiang , Su-Fu Lee , Hsiu-Ying Hsu
- Applicant Address: TW Taoyuan County TW Taoyuan County TW Taoyuan County
- Assignee: Hui-Ping Chiang,Su-Fu Lee,Hsiu-Ying Hsu
- Current Assignee: Hui-Ping Chiang,Su-Fu Lee,Hsiu-Ying Hsu
- Current Assignee Address: TW Taoyuan County TW Taoyuan County TW Taoyuan County
- Agency: Rabin & Berdo, P.C.
- Priority: TW101108907A 20120315
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/461 ; G01N33/66 ; C23F1/16 ; C23F1/18 ; H01L21/3213 ; C23F1/20 ; G01N33/52 ; H05K1/09 ; H05K1/16 ; H05K3/38

Abstract:
Disclosed are a test piece and the manufacturing method thereof The test piece includes an insulating substrate and a circuit pattern structure formed on the insulating substrate, wherein circuit pattern structure includes a first metal pattern layer, a second metal pattern layer, a third metal pattern layer, a fourth metal pattern layer, and a fifth metal pattern layer. The first metal pattern layer, the second metal pattern layer, the third metal pattern layer, the fourth metal pattern layer, and the fifth metal pattern layer have same pattern shapes and positions thereof are overlapping in a plane. The first metal pattern layer and the second metal pattern layer are nano-metal films formed by vacuum coating, therefore, the test piece has excellent uniformity of film and low resistance to provide a stable test current to prevent the judging mistakes and to improve the test efficiency.
Public/Granted literature
- US20130240255A1 TEST PIECE AND MANUFACTURING METHOD THEREOF Public/Granted day:2013-09-19
Information query
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