Invention Grant
US09012595B2 Polyimide and photoresist resin composition comprising thereof 有权
包含它们的聚酰亚胺和光致抗蚀剂树脂组合物

Polyimide and photoresist resin composition comprising thereof
Abstract:
The present invention provides polyimide applied to the buffer coating of semiconductors and a photosensitive resin composition including the same. The polyimide is a polyimide polymer represented by Chemical Formula 1 below. Further, the present invention provides a photosensitive resin composition, including 1) BDA-series soluble polyimide having an i-ray permeability of 70% or more; 2) a polyamic acid having elongation of 40% or more; 3) a novolak resin, and 4) diazonaphthoquinone-series photosensitive substance and having a high resolution, high sensitivity, an excellent film characteristic, and mechanical physical properties which are the requirements of semiconductor buffer coating.
Public/Granted literature
Information query
Patent Agency Ranking
0/0