Invention Grant
- Patent Title: Thin-film transistor and method for manufacturing thin-film transistor
- Patent Title (中): 薄膜晶体管及制造薄膜晶体管的方法
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Application No.: US14130941Application Date: 2013-05-29
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Publication No.: US09012914B2Publication Date: 2015-04-21
- Inventor: Yuji Kishida , Kenichirou Nishida , Mitsutaka Matsumoto
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2012-131319 20120608
- International Application: PCT/JP2013/003383 WO 20130529
- International Announcement: WO2013/183251 WO 20131212
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L21/00 ; H01L27/12 ; H05B33/08 ; H01L29/66 ; H01L29/786 ; H01L27/32

Abstract:
A method for manufacturing a thin-film transistor includes: preparing a substrate; forming a gate electrode above the substrate; forming a gate insulating layer above the gate electrode; forming a semiconductor film above the gate insulating layer; forming, above the semiconductor film, a protective layer comprising an organic material; forming a source electrode and a drain electrode which are opposed to each other and each of which has at least a portion located above the protective layer; forming a semiconductor layer patterned, by performing dry etching on the semiconductor film; and performing, in a hydrogen atmosphere, plasma treatment on an altered layer which (i) is a surface layer of the protective layer exposed from the source electrode and the drain electrode and altered by the dry etching, and (ii) has at least a portion contacting a surface of the semiconductor layer.
Public/Granted literature
- US20140124783A1 THIN-FILM TRANSISTOR AND METHOD FOR MANUFACTURING THIN-FILM TRANSISTOR Public/Granted day:2014-05-08
Information query
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