Invention Grant
- Patent Title: Organic light-emitting display apparatus
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Application No.: US13869284Application Date: 2013-04-24
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Publication No.: US09012916B2Publication Date: 2015-04-21
- Inventor: Sang-Ho Moon , Jong-Moo Huh , Sung-Ho Kim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2012-0141197 20121206
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L51/00 ; H01L27/32 ; H01L21/02 ; H01L27/12

Abstract:
A method of manufacturing a polysilicon (poly-Si) layer, a method of manufacturing an organic light-emitting display apparatus using the method, and an organic light-emitting display apparatus manufactured by using the method. The method includes forming an amorphous silicon (a-Si) layer on a substrate having first and second areas, thermally treating the a-Si layer to partially crystallize the a-Si layer into a partially crystallized Si layer, removing a thermal oxide layer through a thermal treatment, selectively irradiating the first areas with laser beams to crystallize the partially crystallized Si layer.
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