Invention Grant
- Patent Title: Semiconductor device including oxide semiconductor
- Patent Title (中): 半导体器件包括氧化物半导体
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Application No.: US12730288Application Date: 2010-03-24
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Publication No.: US09012918B2Publication Date: 2015-04-21
- Inventor: Shunpei Yamazaki , Takayuki Abe , Hideaki Shishido
- Applicant: Shunpei Yamazaki , Takayuki Abe , Hideaki Shishido
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP2009-080202 20090327
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L29/10 ; H01L31/00 ; H01L29/786 ; H01L27/12

Abstract:
The threshold voltage is shifted in a negative or positive direction in some cases by an unspecified factor in a manufacturing process of the thin film transistor. If the amount of shift from 0 V is large, driving voltage is increased, which results in an increase in power consumption of a semiconductor device. Thus, a resin layer having good flatness is formed as a first protective insulating film covering the oxide semiconductor layer, and then a second protective insulating film is formed by a sputtering method or a plasma CVD method under a low power condition over the resin layer. Further, in order to adjust the threshold voltage to a desired value, gate electrodes are provided over and below an oxide semiconductor layer.
Public/Granted literature
- US20100244029A1 SEMICONDUCTOR DEVICE Public/Granted day:2010-09-30
Information query
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