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US09013025B2 Inductor device and semiconductor device 有权
电感器件和半导体器件

Inductor device and semiconductor device
Abstract:
An inductor device includes an insulation layer, an inductor, fixed electrodes, and a movable electrode. The inductor is formed on the insulation layer. The fixed electrodes are provided in positions which do not overlap with the inductor in a planar view. The movable electrode overlaps with the inductor and the fixed electrodes in the planar view, and is separated from the inductor and the fixed electrodes. Further, the movable electrode includes first openings.
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