Invention Grant
US09013857B2 Altering capacitance of MIM capacitor having reactive layer therein
有权
改变其中具有反应层的MIM电容器的电容
- Patent Title: Altering capacitance of MIM capacitor having reactive layer therein
- Patent Title (中): 改变其中具有反应层的MIM电容器的电容
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Application No.: US13716731Application Date: 2012-12-17
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Publication No.: US09013857B2Publication Date: 2015-04-21
- Inventor: Daniel C. Edelstein , Anthony K. Stamper
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Anthony J. Canale
- Main IPC: H01G5/01
- IPC: H01G5/01 ; H01G7/06 ; H01G7/02 ; H01G7/04 ; H01L49/02
Abstract:
Embodiments of a method include forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer; and altering the reactive layer to change a capacitive value of the MIM capacitor.
Public/Granted literature
- US20130107416A1 ALTERING CAPACITANCE OF MIM CAPACITOR HAVING REACTIVE LAYER THEREIN Public/Granted day:2013-05-02
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