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US09019363B2 Microscope stability using a single optical path and image detector 有权
使用单个光路和图像检测器显微镜稳定性

Microscope stability using a single optical path and image detector
Abstract:
Stabilization, via active-feedback positional drift-correction, of an optical microscope imaging system in up to 3-dimensions is achieved using the optical measurement path of an image sensor. Nanometer-scale stability of the imaging system is accomplished by correcting for positional drift using fiduciary references sparsely distributed within or in proximity to the experimental sample.
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