Invention Grant
- Patent Title: Signal path of a multiple-patterned semiconductor device
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Application No.: US13787948Application Date: 2013-03-07
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Publication No.: US09021407B2Publication Date: 2015-04-28
- Inventor: David H. Allen , Douglas M. Dewanz , David P. Paulsen , John E. Sheets, II
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Peder M. Jacobson; Robert R. Williams
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/00 ; H01L21/033 ; H01L27/02 ; H01L23/528
Abstract:
A multiple-patterned semiconductor device is provided. The semiconductor device includes one or more layers with signal tracks defined by masks and a structure for transferring a signal between signal tracks and repowering the signal.
Public/Granted literature
- US20140184321A1 SIGNAL PATH OF A MULTIPLE-PATTERNED SEMICONDUCTOR DEVICE Public/Granted day:2014-07-03
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