Invention Grant
US09021897B2 Versatile, flexible, and robust MEMS/NEMS sensor for decoupled measuring of three-dimensional forces in air or liquids
有权
多功能，灵活和坚固的MEMS / NEMS传感器用于空气或液体中三维力的去耦测量
- Patent Title: Versatile, flexible, and robust MEMS/NEMS sensor for decoupled measuring of three-dimensional forces in air or liquids
- Patent Title (中): 多功能，灵活和坚固的MEMS / NEMS传感器用于空气或液体中三维力的去耦测量
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Application No.: US13598661Application Date: 2012-08-30
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Publication No.: US09021897B2Publication Date: 2015-05-05
- Inventor: Shengyuan Yang
- Applicant: Shengyuan Yang
- Agency: Beusse Wolter Sanks & Maire, p.A
- Agent John L. DeAngelis
- Main IPC: G01L5/10
- IPC: G01L5/10 ; G01L1/00
Abstract:
A force measuring device. The device comprises an x-axis sensor beam for measuring x-direction forces, a y-axis sensor beam for measuring y-direction forces, a z-axis sensor beam for measuring z-direction forces, and wherein the x-axis, y-axis and z-axis sensor beams are decoupled such that forces exerted by a specimen in one direction do not exert substantial forces on the other two sensor beams.
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