Invention Grant
US09021898B2 Microelectromechanical sensor for measuring a force, and corresponding method 有权
用于测量力的微机电传感器及相应的方法

Microelectromechanical sensor for measuring a force, and corresponding method
Abstract:
A microelectromechanical sensor is configured to measure a force, a pressure, or the like. The sensor includes a substrate and a measuring element. The measuring element includes at least two electrically conductive regions, and at least one of the electrically conductive regions is at least partly connected to the substrate. The sensor also includes at least one changing region, and the changing region lies at least partly between the electrically conductive regions. The changing region is configured in a substantially electrically insulating manner in an unloaded state and in a substantially electrically conductive manner in a loaded state.
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