Invention Grant
- Patent Title: Microelectromechanical sensor for measuring a force, and corresponding method
- Patent Title (中): 用于测量力的微机电传感器及相应的方法
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Application No.: US13882767Application Date: 2011-09-21
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Publication No.: US09021898B2Publication Date: 2015-05-05
- Inventor: Tino Fuchs
- Applicant: Tino Fuchs
- Applicant Address: US DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: US DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- Priority: DE102010043277 20101103
- International Application: PCT/EP2011/066393 WO 20110921
- International Announcement: WO2012/059266 WO 20120510
- Main IPC: G01L1/10
- IPC: G01L1/10 ; G01L1/04 ; G01L1/00 ; B81B3/00 ; G01L7/08 ; G01L9/00 ; G01P15/12 ; B81C1/00

Abstract:
A microelectromechanical sensor is configured to measure a force, a pressure, or the like. The sensor includes a substrate and a measuring element. The measuring element includes at least two electrically conductive regions, and at least one of the electrically conductive regions is at least partly connected to the substrate. The sensor also includes at least one changing region, and the changing region lies at least partly between the electrically conductive regions. The changing region is configured in a substantially electrically insulating manner in an unloaded state and in a substantially electrically conductive manner in a loaded state.
Public/Granted literature
- US20130319138A1 MICROELECTROMECHANICAL SENSOR FOR MEASURING A FORCE, AND CORRESPONDING METHOD Public/Granted day:2013-12-05
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