Invention Grant
US09021984B2 Plasma processing apparatus and semiconductor device manufacturing method
有权
等离子体处理装置和半导体装置的制造方法
- Patent Title: Plasma processing apparatus and semiconductor device manufacturing method
- Patent Title (中): 等离子体处理装置和半导体装置的制造方法
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Application No.: US13075634Application Date: 2011-03-30
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Publication No.: US09021984B2Publication Date: 2015-05-05
- Inventor: Takashi Yamamoto , Shunsuke Mizukami , Ryuji Ohtani , Kimlhiro Higuchi
- Applicant: Takashi Yamamoto , Shunsuke Mizukami , Ryuji Ohtani , Kimlhiro Higuchi
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2010-077282 20100330
- Main IPC: C23C16/507
- IPC: C23C16/507 ; C23C16/509 ; H01L21/306 ; C23F1/00 ; H01L21/683 ; H01J37/32 ; C23C16/06 ; C23C16/22 ; H01L21/67

Abstract:
A plasma processing apparatus includes a processing chamber; a lower electrode provided in the processing chamber and having a base made of a conductive metal to which a high frequency power is applied, the lower electrode also serving as a mounting table for mounting thereon a target substrate; an upper electrode provided in the processing chamber to face the lower electrode; and a focus ring disposed above the lower electrode to surround the target substrate. An electrical connection mechanism is provided between the base of the lower electrode and the focus ring to electrically connect the base of the lower electrode to the focus ring through a current control element, and generates a DC current in accordance with a potential difference.
Public/Granted literature
- US20110240221A1 PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD Public/Granted day:2011-10-06
Information query
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