Invention Grant
US09022037B2 Laser ablation method and apparatus having a feedback loop and control unit 有权
具有反馈回路和控制单元的激光烧蚀方法和装置

Laser ablation method and apparatus having a feedback loop and control unit
Abstract:
A laser ablation method and apparatus uses a laser device to generate a pulsed laser using a laser device and to project the pulsed laser onto an ablation target to be ablated. A probe is then used to measure an indicative property of the ablation target or of the pulsed laser projected on the ablation target. A control loop is used to optimize ablation effect by generating a feedback signal according to the measured indicative property, sending the feedback signal to a control unit, and adjusting an output parameter of the pulsed laser according to the feedback signal. The measured indicative property may be a size of the laser beam spot or a material composition. The ablation, the feedback and the adjustment may be performed dynamically.
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