Invention Grant
- Patent Title: Reticle pod with drain structure
- Patent Title (中): 带有排水结构的花岗岩荚
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Application No.: US13675141Application Date: 2012-11-13
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Publication No.: US09022216B2Publication Date: 2015-05-05
- Inventor: Chen-Wei Ku , Pao-Yi Lu , Chin-Ming Lin , Jain-Pin Sheng
- Applicant: Gudeng Precision Industrial Co., Ltd.
- Applicant Address: TW New Taipei
- Assignee: Gudeng Precision Industrial Co., Ltd.
- Current Assignee: Gudeng Precision Industrial Co., Ltd.
- Current Assignee Address: TW New Taipei
- Agency: Rosenberg, Klein & Lee
- Priority: TW100142147A 20111117
- Main IPC: B65D85/48
- IPC: B65D85/48 ; H01L21/673

Abstract:
A reticle pod with drain structure comprises an outer container and an inner container, wherein an upper cover of inner container is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer container are used to press the retainers for fastening and stabilizing the reticle in the inner container and thus ensuring safety and stability of the reticle in the reticle pod. Collision risks of the reticle in the reticle pod due to vacillation of reticle pod during transportation can be reduced. Cost of reticles also can be greatly decreased. Further, a plurality of drain holes is disposed on a lower cover of the outer container for draining the remained water in the outer container. It will be done without disassembling the lower cover of outer container for reducing the contamination opportunity in the pod and preventing from wasting of labor and time for disassembling.
Public/Granted literature
- US20130126378A1 RETICLE POD WITH DRAIN STRUCTURE Public/Granted day:2013-05-23
Information query
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