Invention Grant
- Patent Title: Filtration filter and production method therefor
- Patent Title (中): 过滤过滤器及其生产方法
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Application No.: US14006177Application Date: 2012-03-13
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Publication No.: US09022225B2Publication Date: 2015-05-05
- Inventor: Tsuyoshi Moriya , Asao Yamashita
- Applicant: Tsuyoshi Moriya , Asao Yamashita
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2011-065997 20110324; JP2011-156681 20110715
- International Application: PCT/JP2012/056953 WO 20120313
- International Announcement: WO2012/128235 WO 20120927
- Main IPC: B01D25/00
- IPC: B01D25/00 ; B01D29/62 ; B01D29/46 ; B01D63/08 ; B01D39/16 ; B01D39/20 ; B01D61/02 ; B01D61/04 ; B01D69/10 ; B01D29/00 ; B01D61/24 ; B01D65/02

Abstract:
Provided is a filtration filer with which a stable opening size during filtration is obtained, and which can be easily regenerated when clogged and used repeatedly. The filtration filter (10) comprises: a substrate stack wherein substrates (11) that have a through hole that penetrates from front to back are stacked; stoppers (15) that define the spacing between the substrates (11); and pillars (16) with a larger thermal expansion coefficient than the stoppers (15). The spacing between the substrates (11) at normal temperature is defined at least by the stoppers (15), and the spacing when heated is defined by the thermally expanded pillars (16). The gaps between the substrates (11) form the filtration surface that traps contaminants contained in the liquid that is being treated A.
Public/Granted literature
- US20140008290A1 FILTRATION FILTER AND PRODUCTION METHOD THEREFOR Public/Granted day:2014-01-09
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