Invention Grant
- Patent Title: Wafer stocker
- Patent Title (中): 晶圆储存器
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Application No.: US13470362Application Date: 2012-05-14
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Publication No.: US09022232B2Publication Date: 2015-05-05
- Inventor: Sheng-Jung Chang , Hang-Hao Feng
- Applicant: Sheng-Jung Chang , Hang-Hao Feng
- Applicant Address: TW Hwa-Ya Technology Park Kueishan, Taoyuan
- Assignee: Inotera Memories, Inc.
- Current Assignee: Inotera Memories, Inc.
- Current Assignee Address: TW Hwa-Ya Technology Park Kueishan, Taoyuan
- Agent Winston Hsu; Scott Margo
- Priority: TW101100951A 20120110
- Main IPC: H01L21/677
- IPC: H01L21/677
Abstract:
A wafer stocker is provided in present invention including a main body having an opening communicating with an inner accommodation space, a plurality of storage cells for wafer pod disposed in the main body, and an embedded storage shelf mounting in the accommodation space of the main body via the opening, the embedded storage shelf is provided with a plurality of storage cells for wafer pods which may combine with the storage cells in the main body to serve jointly as the storage cells of the entire wafer stocker, wherein the embedded storage shelf may be removed from the accommodation space to be replaced with an embedded wafer sorter.
Public/Granted literature
- US20130175908A1 Wafer Stocker Public/Granted day:2013-07-11
Information query
IPC分类:
