Invention Grant
- Patent Title: Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
- Patent Title (中): 压电元件，液体喷射头和液体喷射装置
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Application No.: US13481355Application Date: 2012-05-25
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Publication No.: US09022530B2Publication Date: 2015-05-05
- Inventor: Koji Ohashi
- Applicant: Koji Ohashi
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2011-123837 20110601
- Main IPC: B41J2/045
- IPC: B41J2/045 ; B41J2/14 ; B41J2/055 ; H01L41/08 ; H01L41/09 ; H01L41/187 ; H01L41/29 ; H01L41/318
Abstract:
A piezoelectric element comprises a piezoelectric film which comprises perovskite type crystals at least including Pb, Ti, and Zr, and an electrode which is provided to the piezoelectric film. A diffraction peak position (2θ) of X-rays derived from a (100) plane of the piezoelectric film is from 21.89 to 21.97, and a half-peak width (2θ) of a (200) plane is from 0.30 to 0.50.
Public/Granted literature
- US20120305665A1 PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS Public/Granted day:2012-12-06
Information query
IPC分类:
