Invention Grant
US09022531B2 Piezoelectric element, liquid discharge head and liquid discharge apparatus 有权
压电元件,排液头和液体排出装置

Piezoelectric element, liquid discharge head and liquid discharge apparatus
Abstract:
The piezoelectric element includes, on a substrate: a piezoelectric film; and a pair of electrodes provided in contact with the piezoelectric film; in which the piezoelectric film contains a perovskite-type metal oxide represented by the general formula (1) as a main component: Ax(ZnjTi(1-j))l(MgkTi(1-k))mMnO3  General Formula (1) wherein the perovskite-type metal oxide is uniaxially (111)-oriented in pseudo-cubic notation in a thickness direction, of the pair of electrodes, a lower electrode provided on the substrate side is a multilayer electrode including at least a first electrode layer in contact with the substrate and a second electrode layer in contact with the piezoelectric film, and the second electrode layer is a perovskite-type metal oxide electrode which is uniaxially (111)-oriented in pseudo-cubic notation in a thickness direction.
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