Invention Grant
- Patent Title: Piezoelectric element, liquid discharge head and liquid discharge apparatus
- Patent Title (中): 压电元件,排液头和液体排出装置
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Application No.: US13770250Application Date: 2013-02-19
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Publication No.: US09022531B2Publication Date: 2015-05-05
- Inventor: Makoto Kubota , Kaoru Miura , Hisato Yabuta , Takayuki Watanabe , Jumpei Hayashi , Hiroshi Funakubo , Shintaro Yasui , Takahiro Oikawa , Jun-ichi Nagata , Hiroshi Uchida
- Applicant: Canon Kabushiki Kaisha , Tokyo Institute of Technology , Sophia School Corporation
- Applicant Address: JP Tokyo JP Tokyo JP Tokyo
- Assignee: Canon Kabushiki Kaisha,Tokyo Institute of Technology,Sophia School Corporation
- Current Assignee: Canon Kabushiki Kaisha,Tokyo Institute of Technology,Sophia School Corporation
- Current Assignee Address: JP Tokyo JP Tokyo JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2012-041571 20120228
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H01L41/18 ; B41J2/14 ; H01L41/047 ; H01L41/08 ; H01L41/187 ; H01L41/316 ; H01L41/318

Abstract:
The piezoelectric element includes, on a substrate: a piezoelectric film; and a pair of electrodes provided in contact with the piezoelectric film; in which the piezoelectric film contains a perovskite-type metal oxide represented by the general formula (1) as a main component: Ax(ZnjTi(1-j))l(MgkTi(1-k))mMnO3 General Formula (1) wherein the perovskite-type metal oxide is uniaxially (111)-oriented in pseudo-cubic notation in a thickness direction, of the pair of electrodes, a lower electrode provided on the substrate side is a multilayer electrode including at least a first electrode layer in contact with the substrate and a second electrode layer in contact with the piezoelectric film, and the second electrode layer is a perovskite-type metal oxide electrode which is uniaxially (111)-oriented in pseudo-cubic notation in a thickness direction.
Public/Granted literature
- US20130222482A1 PIEZOELECTRIC ELEMENT, LIQUID DISCHARGE HEAD AND LIQUID DISCHARGE APPARATUS Public/Granted day:2013-08-29
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