Invention Grant
US09022532B1 Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and ink-jet printer device 有权
压电元件,压电致动器,压电传感器,硬盘驱动器和喷墨打印机设备

Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and ink-jet printer device
Abstract:
The displacement as an actuator or the sensitivity as a sensor of a piezoelectric element can be increased and, in addition, the electric power consumption can be reduced by providing a thin film of potassium-sodium niobate, which is a perovskite type compound represented by a general formula ABO3, as a piezoelectric layer, wherein a crystal orientation of a crystal structure of potassium-sodium niobate has in-plane fourfold symmetry as a whole piezoelectric layer, where a first axis of rotational symmetry is a thickness direction of the piezoelectric layer.
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