Invention Grant
US09022532B1 Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and ink-jet printer device
有权
压电元件,压电致动器,压电传感器,硬盘驱动器和喷墨打印机设备
- Patent Title: Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and ink-jet printer device
- Patent Title (中): 压电元件,压电致动器,压电传感器,硬盘驱动器和喷墨打印机设备
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Application No.: US14058912Application Date: 2013-10-21
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Publication No.: US09022532B1Publication Date: 2015-05-05
- Inventor: Yasuhiro Aida , Ryu Ohta , Yoshitomo Tanaka , Hiroshi Chihara , Hitoshi Sakuma , Kazuhiko Maejima
- Applicant: TDK Corporation
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H01L41/08 ; H01L41/187 ; G01L1/16

Abstract:
The displacement as an actuator or the sensitivity as a sensor of a piezoelectric element can be increased and, in addition, the electric power consumption can be reduced by providing a thin film of potassium-sodium niobate, which is a perovskite type compound represented by a general formula ABO3, as a piezoelectric layer, wherein a crystal orientation of a crystal structure of potassium-sodium niobate has in-plane fourfold symmetry as a whole piezoelectric layer, where a first axis of rotational symmetry is a thickness direction of the piezoelectric layer.
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