Invention Grant
- Patent Title: Method for producing spot size converter
- Patent Title (中): 光斑尺寸转换器的制造方法
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Application No.: US14267556Application Date: 2014-05-01
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Publication No.: US09023677B2Publication Date: 2015-05-05
- Inventor: Naoko Konishi , Hideki Yagi , Ryuji Masuyama , Yoshihiro Yoneda
- Applicant: Sumitomo Electric Industries, Ltd.
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell LLP
- Priority: JP2013-099339 20130509
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/0232 ; H01L31/18

Abstract:
A method for producing a spot size converter includes the steps of forming a first insulator mask on a stacked semiconductor layer; forming first and second terraces, and a waveguide mesa disposed between the first and second terraces by etching the stacked semiconductor layer using the first insulator mask, the first terrace having first to fourth terrace portions, the second terrace having fifth to eighth terrace portions, the waveguide mesa having first to fourth mesa portions; forming a second insulator mask including a first pattern on the first terrace portion, a second pattern on the fifth terrace portion, a third pattern on the third and fourth mesa portions, and a fourth pattern that integrally covers a region extending from the fourth terrace portion to the eighth terrace portion through the fourth mesa portion; and selectively growing a semiconductor layer by using the second insulator mask.
Public/Granted literature
- US20140335644A1 METHOD FOR PRODUCING SPOT SIZE CONVERTER Public/Granted day:2014-11-13
Information query
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