Invention Grant
- Patent Title: Transparent conductive zinc oxide film, process for production thereof, and use thereof
- Patent Title (中): 透明导电性氧化锌膜及其制造方法及其用途
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Application No.: US13639347Application Date: 2011-04-07
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Publication No.: US09024176B2Publication Date: 2015-05-05
- Inventor: Ryo Akiike , Hideto Kuramochi , Hitoshi Iigusa
- Applicant: Ryo Akiike , Hideto Kuramochi , Hitoshi Iigusa
- Applicant Address: JP Yamaguchi
- Assignee: Tosoh Corporation
- Current Assignee: Tosoh Corporation
- Current Assignee Address: JP Yamaguchi
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JPP2010-089285 20100408; JPP2011-049942 20110308
- International Application: PCT/JP2011/058814 WO 20110407
- International Announcement: WO2011/126074 WO 20111013
- Main IPC: H01L31/00
- IPC: H01L31/00 ; C23C14/00 ; C23C14/32 ; D06N7/04 ; G11B5/64 ; C23C14/58 ; C23C14/08 ; C23C14/34
Abstract:
A transparent conductive zinc oxide based film according to the present invention contains Ti, Al and Zn in such a proportion that satisfies the following formulae (1), (2) and (3) in terms of atomic ratio, and has a plurality of surface textures different in size on a surface, wherein a center-line average surface roughness Ra of the surface of the transparent conductive film is 30 nm to 200 nm, and an average value of widths of the surface textures is 100 nm to 10 μm. 0.001≦Ti/(Zn+Al+Ti)≦0.079. (1) 0.001≦Al/(Zn+Al+Ti)≦0.079 (2) 0.010≦(Ti+Al)/(Zn+Al+Ti)≦0.080 (3)
Public/Granted literature
- US20130048060A1 TRANSPARENT CONDUCTIVE ZINC OXIDE FILM, PROCESS FOR PRODUCTION THEREOF, AND USE THEREOF Public/Granted day:2013-02-28
Information query
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