Invention Grant
- Patent Title: Vertical transistor phase change memory
- Patent Title (中): 垂直晶体管相变存储器
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Application No.: US14445669Application Date: 2014-07-29
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Publication No.: US09024290B2Publication Date: 2015-05-05
- Inventor: Jun Liu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
Vertical transistor phase change memory and methods of processing phase change memory are described herein. One or more methods include forming a dielectric on at least a portion of a vertical transistor, forming an electrode on the dielectric, and forming a vertical strip of phase change material on a portion of a side of the electrode and on a portion of a side of the dielectric extending along the electrode and the dielectric into contact with the vertical transistor.
Public/Granted literature
- US20140353571A1 VERTICAL TRANSISTOR PHASE CHANGE MEMORY Public/Granted day:2014-12-04
Information query
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