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US09024290B2 Vertical transistor phase change memory 有权
垂直晶体管相变存储器

Vertical transistor phase change memory
Abstract:
Vertical transistor phase change memory and methods of processing phase change memory are described herein. One or more methods include forming a dielectric on at least a portion of a vertical transistor, forming an electrode on the dielectric, and forming a vertical strip of phase change material on a portion of a side of the electrode and on a portion of a side of the dielectric extending along the electrode and the dielectric into contact with the vertical transistor.
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