Invention Grant
- Patent Title: 3D memory array with improved SSL and BL contact layout
- Patent Title (中): 3D内存阵列具有改进的SSL和BL联系布局
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Application No.: US14513721Application Date: 2014-10-14
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Publication No.: US09024374B2Publication Date: 2015-05-05
- Inventor: Chun Hsiung Hung , Hang-Ting Lue , Shin-Jang Shen
- Applicant: Macronix International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Agent Kenta Suzue
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/115 ; H01L27/24 ; H01L23/525 ; H01L29/423 ; H01L21/768

Abstract:
A 3D memory device includes a plurality of ridges, in some embodiments ridge-shaped, in the form of multiple strips of conductive material separated by insulating material, arranged as bit lines which can be coupled through decoding circuits to sense amplifiers. The strips of conductive material have side surfaces on the sides of the stacks. A plurality of conductive lines arranged as word lines which can be coupled to row decoders, extends orthogonally over the plurality of stacks. The conductive lines conform to the surface of the stacks. Memory elements lie in a multi-layer array of interface regions at cross-points between side surfaces of the semiconductor material strips on the stacks and the conductive lines. The memory elements are programmable, like the anti-fuses or charge trapping structures. In some embodiments, the 3D memory is made using only two critical masks for multiple layers. Some embodiments include a staircase-shaped structure positioned at ends of the semiconductor material strips. Some embodiments include SSL interconnects on a metal layer parallel to the semiconductor material strips, and further SSL interconnects on a higher metal layer, parallel to the word lines.
Public/Granted literature
- US20150054057A1 3D MEMORY ARRAY WITH IMPROVED SSL AND BL CONTACT LAYOUT Public/Granted day:2015-02-26
Information query
IPC分类: