Invention Grant
US09024376B2 Vertical transistor with dielectrically-isolated work-function metal electrodes surrounding the semiconductor pillar 有权
垂直晶体管,具有介电隔离的工作功能金属电极,围绕半导体柱

Vertical transistor with dielectrically-isolated work-function metal electrodes surrounding the semiconductor pillar
Abstract:
A semiconductor device includes a pillar-shaped semiconductor having an impurity concentration of 1017 cm−3 or less, a first insulator that surrounds the pillar-shaped semiconductor, a first metal that surrounds a portion of the first insulator at a first end of the pillar-shaped semiconductor, a second metal that surrounds a portion of the first insulator at the second end of the pillar-shaped semiconductor, a third metal that surrounds a portion of the first insulator in a region sandwiched between the first metal and the second metal, a second insulator formed between the first and third metals, a third insulator formed between the second and third metals, a fourth metal that connects the first metal and the one end, and a fifth metal that connects the second metal and the other end. The third metal has a work function of about 4.2 eV to about 5.0 eV.
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