Invention Grant
- Patent Title: Vertical transistor with dielectrically-isolated work-function metal electrodes surrounding the semiconductor pillar
- Patent Title (中): 垂直晶体管,具有介电隔离的工作功能金属电极,围绕半导体柱
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Application No.: US14160788Application Date: 2014-01-22
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Publication No.: US09024376B2Publication Date: 2015-05-05
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Peninsula Plaza
- Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee Address: SG Peninsula Plaza
- Agency: Brinks Gilson & Lione
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/78

Abstract:
A semiconductor device includes a pillar-shaped semiconductor having an impurity concentration of 1017 cm−3 or less, a first insulator that surrounds the pillar-shaped semiconductor, a first metal that surrounds a portion of the first insulator at a first end of the pillar-shaped semiconductor, a second metal that surrounds a portion of the first insulator at the second end of the pillar-shaped semiconductor, a third metal that surrounds a portion of the first insulator in a region sandwiched between the first metal and the second metal, a second insulator formed between the first and third metals, a third insulator formed between the second and third metals, a fourth metal that connects the first metal and the one end, and a fifth metal that connects the second metal and the other end. The third metal has a work function of about 4.2 eV to about 5.0 eV.
Public/Granted literature
- US20140209998A1 SEMICONDUCTOR DEVICE Public/Granted day:2014-07-31
Information query
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