Invention Grant
- Patent Title: Taxel-addressable matrix of vertical nanowire piezotronic transistors
- Patent Title (中): 垂直纳米线压电晶体管的可寻址矩阵
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Application No.: US14019691Application Date: 2013-09-06
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Publication No.: US09024395B2Publication Date: 2015-05-05
- Inventor: Zhong Lin Wang , Wenzhuo Wu , Xiaonan Wen
- Applicant: Georgia Tech Research Corporation
- Applicant Address: US GA Atlanta
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Current Assignee Address: US GA Atlanta
- Agency: Bockhop & Associates, LLC
- Agent Bryan W. Bockhop
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L41/113 ; G06F3/041 ; H01L27/20 ; H01L41/22

Abstract:
A tactile sensing matrix includes a substrate, a first plurality of elongated electrode structures, a plurality of vertically aligned piezoelectric members, an insulating layer infused into the piezoelectric members and a second plurality of elongated electrode structures. The first plurality of elongated electrode structures is disposed on the substrate along a first orientation. The vertically aligned piezoelectric members is disposed on the first plurality of elongated electrode structures and form a matrix having columns of piezoelectric members disposed along the first orientation and rows of piezoelectric members disposed along a second orientation that is transverse to the first orientation. The second plurality of elongated electrode structures is disposed on the insulating layer along the second orientation. The elongated electrode structures form a Schottky contact with the piezoelectric members. When pressure is applied to the piezoelectric members, current flow therethrough is modulated.
Public/Granted literature
- US20140070338A1 Taxel-addressable matrix of vertical nanowire piezotronic transistors Public/Granted day:2014-03-13
Information query
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