Invention Grant
- Patent Title: Waveguide avalanche photodetectors
- Patent Title (中): 波导雪崩光电探测器
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Application No.: US13695553Application Date: 2011-11-02
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Publication No.: US09024402B2Publication Date: 2015-05-05
- Inventor: Yimin Kang , Zhihong Connie Huang , Han-Din Dean Liu , Yuval Saado , Yun-Chung Neil Na
- Applicant: Yimin Kang , Zhihong Connie Huang , Han-Din Dean Liu , Yuval Saado , Yun-Chung Neil Na
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- International Application: PCT/US2011/058970 WO 20111102
- International Announcement: WO2013/066325 WO 20130510
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L31/107 ; H01L29/732 ; H01L31/0328 ; H01L31/0336 ; H01L31/072 ; H01L31/109 ; H01L31/028

Abstract:
Devices comprised of end-on waveguide-coupled photodetectors are described. In embodiments of the invention, the photodetectors are avalanche photodiodes coupled end-on to a waveguide. The waveguide includes an insulating trench proximate to the coupled photodetector. In embodiments of the invention, the avalanche photodiodes are silicon/germanium avalanche photodiodes.
Public/Granted literature
- US20140231946A1 WAVEGUIDE AVALANCHE PHOTODETECTORS Public/Granted day:2014-08-21
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