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US09024402B2 Waveguide avalanche photodetectors 有权
波导雪崩光电探测器

Waveguide avalanche photodetectors
Abstract:
Devices comprised of end-on waveguide-coupled photodetectors are described. In embodiments of the invention, the photodetectors are avalanche photodiodes coupled end-on to a waveguide. The waveguide includes an insulating trench proximate to the coupled photodetector. In embodiments of the invention, the avalanche photodiodes are silicon/germanium avalanche photodiodes.
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