Invention Grant
- Patent Title: Solid-state image sensor
- Patent Title (中): 固态图像传感器
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Application No.: US13034194Application Date: 2011-02-24
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Publication No.: US09024405B2Publication Date: 2015-05-05
- Inventor: Takeshi Aoki
- Applicant: Takeshi Aoki
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2010-061233 20100317; JP2011-031260 20110216
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L27/146

Abstract:
A solid-state image sensor including an effective pixel portion in which a plurality of pixels including photodiodes formed on a semiconductor substrate are arranged, and a peripheral portion arranged around the effective pixel portion, includes a plurality of metal wiring layers arranged above the semiconductor substrate, and a planarizing film covering a patterned metal wiring layer that is a top layer among the plurality of metal wiring layers, wherein in the effective pixel portion, the plurality of metal wiring layers have openings configured to guide light to the photodiodes, and in the peripheral portion, an opening is provided in the top layer, and at least one metal wiring layer between the top layer and the semiconductor substrate has a pattern which blocks light incident on the photodiodes via the opening in the top layer.
Public/Granted literature
- US20110227182A1 SOLID-STATE IMAGE SENSOR Public/Granted day:2011-09-22
Information query
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