Invention Grant
US09024512B2 Resonant transducer, method of producing the resonant transducer, and ultrasonic treatment tool including the resonant transducer
有权
谐振换能器，谐振换能器的制造方法以及包括谐振换能器的超声波处理工具
- Patent Title: Resonant transducer, method of producing the resonant transducer, and ultrasonic treatment tool including the resonant transducer
- Patent Title (中): 谐振换能器，谐振换能器的制造方法以及包括谐振换能器的超声波处理工具
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Application No.: US13366130Application Date: 2012-02-03
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Publication No.: US09024512B2Publication Date: 2015-05-05
- Inventor: Yasutoshi Hirabayashi , Takamichi Fujii
- Applicant: Yasutoshi Hirabayashi , Takamichi Fujii
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2011-042511 20110228
- Main IPC: H01L41/09
- IPC: H01L41/09 ; A61B17/32 ; A61B17/22 ; H01L41/08 ; H01L41/316 ; H01L41/25 ; A61B17/00
Abstract:
A resonant transducer comprising: a vibration plate; and a piezoelectric element including a piezoelectric film and an upper electrode that are laminated on the vibration plate, wherein a compressive stress is applied to the piezoelectric film.
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