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US09024709B2 Tunable evanescent-mode cavity filter 有权
可调ev逝模式滤波器

Tunable evanescent-mode cavity filter
Abstract:
A tunable filter having an electronically tunable center frequency and dynamic bandwidth control over a large tuning range. High-Q continuously tunable evanescent-mode cavity resonators and filters using reliable RF MEMS actuators. One embodiment is a 3.4-6.2 GHz (1.8:1 tuning ratio) continuously tunable electrostatic MEMS resonator with quality factor of 460-530, with a volume of 18×30×4 mm including the actuation scheme and biasing lines. A tunable resonators is also disclosed with a 2.8:1 (5.0-1.9 GHz) tuning ratio, and Q of 300-650.
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