Invention Grant
US09025128B2 Actuator including magnet for a projection exposure system and projection exposure system including a magnet
有权
致动器包括用于投影曝光系统的磁体和包括磁体的投影曝光系统
- Patent Title: Actuator including magnet for a projection exposure system and projection exposure system including a magnet
- Patent Title (中): 致动器包括用于投影曝光系统的磁体和包括磁体的投影曝光系统
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Application No.: US13196592Application Date: 2011-08-02
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Publication No.: US09025128B2Publication Date: 2015-05-05
- Inventor: Armin Werber , Norbert Muehlberger , Almut Czap , Juergen Fischer
- Applicant: Armin Werber , Norbert Muehlberger , Almut Czap , Juergen Fischer
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102009008209 20090210
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B26/08 ; G02B27/00 ; H01F7/02 ; H01F7/16
Abstract:
The present disclosure relates to an actuator for projection exposure systems that include a magnet. The magnet is encapsulated and/or supported in a magnet holding plate that is produced by microtechnical production methods so that a moving manipulator surface is held in the magnet holding plate via monolithic or bonded connections without additional connecting material so that there is a secure connection.
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