Invention Grant
- Patent Title: Optical beam deflecting element, illumination system including same, and related method
- Patent Title (中): 光束偏转元件，包括其的照明系统及相关方法
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Application No.: US13358158Application Date: 2012-01-25
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Publication No.: US09025131B2Publication Date: 2015-05-05
- Inventor: Daniel Runde , Florian Doll , Reinhard Voelkel , Kenneth Weible , Gundula Weiss , Michael Gerhard
- Applicant: Daniel Runde , Florian Doll , Reinhard Voelkel , Kenneth Weible , Gundula Weiss , Michael Gerhard
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03F7/20
Abstract:
An optical beam deflecting element may be used effectively as an energy distribution manipulator in an illumination system to vary the energy distribution within a given spatial intensity distribution in a pupil plane of the illumination system substantially without changing the shape and size and position of illuminated areas in the pupil plane.
Public/Granted literature
- US20120249988A1 OPTICAL BEAM DEFLECTING ELEMENT, ILLUMINATION SYSTEM INCLUDING SAME, AND RELATED METHOD Public/Granted day:2012-10-04
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