Invention Grant
US09025132B2 Digital exposure apparatus and method of exposing a substrate using the same 有权
数字曝光装置及使用其的曝光基板的方法

Digital exposure apparatus and method of exposing a substrate using the same
Abstract:
A digital exposure apparatus includes a displaceable stage, a light source part, a digital micro mirror part and a micro lens part. A substrate is disposed on the stage. The light source part generates a first light. The digital micro mirror part is disposed over the stage. The digital micro mirror part includes a plurality of digital micro mirrors. The digital micro mirror converts the first light into one or more second light beams. The micro lens part is disposed between the stage and the digital micro mirror part and includes a plurality of micro lenses. The micro lenses convert the one or more second light beams into one or more third light beams which are irradiated upon the substrate. The third light has an oval cross sectional shape.
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