Invention Grant
US09025133B2 Laser interference lithography apparatus using fiber as spatial filter and beam expander
有权
使用光纤作为空间滤波器和光束扩展器的激光干涉光刻设备
- Patent Title: Laser interference lithography apparatus using fiber as spatial filter and beam expander
- Patent Title (中): 使用光纤作为空间滤波器和光束扩展器的激光干涉光刻设备
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Application No.: US13800072Application Date: 2013-03-13
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Publication No.: US09025133B2Publication Date: 2015-05-05
- Inventor: Chien-Chung Fu , Yi-Lin Sun , David Gerard Mikolas , Pao-Te Lin , En-Chiang Chang , Tze-Bin Huang
- Applicant: National Tsing Hua University
- Applicant Address: TW Hsinchu
- Assignee: National Tsing Hua University
- Current Assignee: National Tsing Hua University
- Current Assignee Address: TW Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW101139863A 20121029
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03B27/42 ; G03F7/20

Abstract:
In a laser interference lithography apparatus, a laser source provides a first laser beam, and an optics assembly is optically coupled to the laser source and receives and processes the first laser beam into one or multiple second laser beams. An exposure stage carries a to-be-exposed object. The fiber assembly receives and processes the second laser beam(s) into one or multiple single mode and stable coherent third laser beams without spatial noise. An interference pattern is generated on the to-be-exposed object using the third laser beam(s). The apparatus is configured without a pin hole spatial filter and a beam expander being disposed on an optical path from an output end of the laser source to the exposure stage.
Public/Granted literature
- US20140118715A1 Laser Interference Lithography Apparatus Using Fiber as Spatial Filter and Beam Expander Public/Granted day:2014-05-01
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