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US09025633B2 Optical device, method of manufacturing the same, and laser module 有权
光学装置及其制造方法以及激光模块

Optical device, method of manufacturing the same, and laser module
Abstract:
An optical device includes a ridge semiconductor laser element formed on a substrate, a first insulating film coating a lateral wall portion of a ridge structure of the ridge semiconductor laser element, and a second insulating film coating the ridge structure from above the first insulating film in an end portion region of the ridge structure. The second insulating film has a density lower than a density of the first insulating film.
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