Invention Grant
US09026973B2 System and method for arbitrary metal spacing for self-aligned double patterning
有权
用于自对准双重图案的任意金属间距的系统和方法
- Patent Title: System and method for arbitrary metal spacing for self-aligned double patterning
- Patent Title (中): 用于自对准双重图案的任意金属间距的系统和方法
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Application No.: US13888405Application Date: 2013-05-07
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Publication No.: US09026973B2Publication Date: 2015-05-05
- Inventor: Li-Chun Tien , Chen-Chi Wu , Kuo-Ji Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; H01L21/033

Abstract:
An integrated circuit includes a first conductive structure of a device configured to have a first voltage potential, a second conductive structure of the device configured to have a second voltage potential that is different than the first voltage potential, and a peacekeeper structure disposed between and separating the first conductive structure and the second conductive structure. The peacekeeper structure is separated from at least one of the first conductive structure and the second conductive structure by a fixed spacing distance for conductive lines for a self-aligned double patterning (“SADP”) process from the integrated circuit was formed.
Public/Granted literature
- US20140264894A1 SYSTEM AND METHOD FOR ARBITRARY METAL SPACING FOR SELF-ALIGNED DOUBLE PATTERNING Public/Granted day:2014-09-18
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