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US09026973B2 System and method for arbitrary metal spacing for self-aligned double patterning 有权
用于自对准双重图案的任意金属间距的系统和方法

System and method for arbitrary metal spacing for self-aligned double patterning
Abstract:
An integrated circuit includes a first conductive structure of a device configured to have a first voltage potential, a second conductive structure of the device configured to have a second voltage potential that is different than the first voltage potential, and a peacekeeper structure disposed between and separating the first conductive structure and the second conductive structure. The peacekeeper structure is separated from at least one of the first conductive structure and the second conductive structure by a fixed spacing distance for conductive lines for a self-aligned double patterning (“SADP”) process from the integrated circuit was formed.
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