Invention Grant
US09027407B2 Low-cost temperature and pressure sensor comprising SAW resonators, and method of fabrication for same 有权
包括SAW谐振器的低成本温度和压力传感器及其制造方法

Low-cost temperature and pressure sensor comprising SAW resonators, and method of fabrication for same
Abstract:
A pressure and temperature sensor comprising comprises at least a first resonator of the SAW type comprising a piezoelectric substrate, thinned at least locally, of the membrane type, a second resonator of the SAW type comprising a piezoelectric substrate and a third resonator of the SAW type comprising a piezoelectric substrate, characterized in that the first, the second and the third resonators are respectively on the surface of first, second and third individual piezoelectric substrates, each of the individual substrates being positioned on the surface of a common base section, locally machined away under said first resonator in such a manner as to liberate the substrate from said resonator so as to render it operational for the measurement of pressure. A method of fabrication for such a sensor is also provided.
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